Direct replication of nanostructures from silicon wafers in polymethylpentene by injection molding

R. Bruck; R. Hainberger; R. Heer; N. Kataeva; A. Köck; M. Krapf-Günther; K. Kaiblinger; F. Pipelka; B. Bilenberg

doi:10.1117/12.859817

12 August 2010 Direct replication of nanostructures from silicon wafers in polymethylpentene by injection molding

R. Bruck, R. Hainberger, R. Heer, N. Kataeva, A. Köck, M. Krapf-Günther, K. Kaiblinger, F. Pipelka, B. Bilenberg

Proceedings Volume 7788, Polymer Optics Design, Fabrication, and Materials; 77880A (2010) https://doi.org/10.1117/12.859817
Event: SPIE Optical Engineering + Applications, 2010, San Diego, California, United States

Abstract

Various nanostructures with a feature sizes down to 50 nm as well as photonic structures such as waveguides or grating couplers were successfully replicated into the thermoplastic polymer polymethylpentene employing an injection molding process. Polymethylpentene has highly attractive characteristics for photonic and life-science applications such as a high thermal stability, an outstanding chemical resistivity and excellent optical transparency. In our injection molding process, the structures were directly replicated from 2" silicon wafers that serve as an exchangeable mold insert in the injection mold. We present this injection molding process as a versatile technology platform for the realization of optical integrated devices and diffractive optical components. In particular, we show the application of the injection molding process for the realization of waveguide and grating coupler structures, subwavelength gratings and focusing nanoholes.

Citation Download Citation

R. Bruck, R. Hainberger, R. Heer, N. Kataeva, A. Köck, M. Krapf-Günther, K. Kaiblinger, F. Pipelka, and B. Bilenberg "Direct replication of nanostructures from silicon wafers in polymethylpentene by injection molding", Proc. SPIE 7788, Polymer Optics Design, Fabrication, and Materials, 77880A (12 August 2010); https://doi.org/10.1117/12.859817

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