2 August 2010 Real-time phase demodulation of heterodyne speckle interference patterns using correlation image sensor
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Abstract
A real-time method for heterodyne speckle pattern interferometry using the correlation image sensor (CIS) is proposed. The CIS demodulates the interference phase of heterodyned speckle pattern waves from a singleframe set of temporal correlation images between the beat signal of incident light and three-phase sinusoidal reference signals at each pixel at an ordinary video frame rate. The proposed method does not suffer loss of spatial resolution or decrease in signal-to-noise ratio that would happen for a high-speed image sensor. In-plane and out-of-plane deformation measurement systems are developed with a 200 × 200-pixel CIS camera. The experimental results obtained on these systems show good linearity of the change in speckle interference phase to the voltage applied to a piezoelectric actuator that moves the object.
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Akira Kimachi, "Real-time phase demodulation of heterodyne speckle interference patterns using correlation image sensor", Proc. SPIE 7790, Interferometry XV: Techniques and Analysis, 779007 (2 August 2010); doi: 10.1117/12.859391; https://doi.org/10.1117/12.859391
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