2 August 2010 A compact LED-based phase measuring deflectometry setup
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A compact LED illumination based shape measurement system of glossy surfaces is presented. The system is based on Phase Measuring Deflectometry (PMD). In this system the sinusoidal fringe pattern is formed using photographic 35 mm film frame which is illuminated from behind using LED and diffuser. Beam splitter is used to combine x- and y-direction fringe patterns, which are needed by PMD. Phase shifting is generated manually using translational stages and micrometer actuators. Compared to digital fringes displayed on the screen, our LED based setup can provide higher power, completely diffuse light and produce smoother sinusoidal fringes with continuous intensity distribution. LED usage enables also pulsed illumination to freeze sample movement. The resolution of the method is submicron level. Due to the compact size this setup is promising in the small scale measurement field.
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Petri Lehtonen, Petri Lehtonen, Yuankun Liu, Yuankun Liu, } "A compact LED-based phase measuring deflectometry setup", Proc. SPIE 7790, Interferometry XV: Techniques and Analysis, 77900C (2 August 2010); doi: 10.1117/12.860484; https://doi.org/10.1117/12.860484


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