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2 August 2010 Imaging issues for interferometric measurement of aspheric surfaces using CGH null correctors
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Abstract
Aspheric surfaces are measured using standard interferometers coupled with computer generated holograms (CGHs) that compensate the aspheric wavefronts. Such systems can measure complex aspheric shapes with accuracy of a few nanometers. However, the imaging properties of the interferometer-CGH combination can provide limitations for data mapping, resolution, and accuracy. These effects are explored, with an emphasis on the diffraction effects that are unique to interferometry.
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Ping Zhou, James Burge, and Chunyu Zhao "Imaging issues for interferometric measurement of aspheric surfaces using CGH null correctors", Proc. SPIE 7790, Interferometry XV: Techniques and Analysis, 77900L (2 August 2010); https://doi.org/10.1117/12.862427
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