2 August 2010 Noise reduction in dynamic interferometry measurements
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Abstract
A method for reducing the coherent noise, by a factor of two, in dynamic interferometry measurements is presented. Reducing coherent noise is particularly important in "on-machine" metrology applications where residual noise can be polished into the surface under test. Both theory and experimental measurements are discussed.
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Michael North Morris, Michael North Morris, Markar Naradikian, Markar Naradikian, James Millerd, James Millerd, } "Noise reduction in dynamic interferometry measurements", Proc. SPIE 7790, Interferometry XV: Techniques and Analysis, 77900O (2 August 2010); doi: 10.1117/12.860450; https://doi.org/10.1117/12.860450
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