2 August 2010 Noise reduction in dynamic interferometry measurements
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A method for reducing the coherent noise, by a factor of two, in dynamic interferometry measurements is presented. Reducing coherent noise is particularly important in "on-machine" metrology applications where residual noise can be polished into the surface under test. Both theory and experimental measurements are discussed.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael North Morris, Michael North Morris, Markar Naradikian, Markar Naradikian, James Millerd, James Millerd, "Noise reduction in dynamic interferometry measurements", Proc. SPIE 7790, Interferometry XV: Techniques and Analysis, 77900O (2 August 2010); doi: 10.1117/12.860450; https://doi.org/10.1117/12.860450


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