2 August 2010 Multiple-wavelength interferometers using backpropagation of optical fields for profile measurement of thin glass sheets
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Abstract
Multiple-wavelength optical fields at a detecting plane of an interferometer are generated by a computer from the detected interference signals of a thin glass sheet. The generated optical fields are backpropagated towards the glass sheet along the optical axis. An optical field along the optical axis is reconstructed by summing the backpropagated fields over the multiple wavelengths. The amplitude and phase distributions of the reconstructed optical field provide the positions of the two surfaces of the glass sheet where peak values of the amplitude and zero or π values of the phase appear. The accuracy of the position measurement is several nanometers.
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Osami Sasaki, Osami Sasaki, Samuel Choi, Samuel Choi, Takamasa Suzuki, Takamasa Suzuki, } "Multiple-wavelength interferometers using backpropagation of optical fields for profile measurement of thin glass sheets", Proc. SPIE 7790, Interferometry XV: Techniques and Analysis, 77900U (2 August 2010); doi: 10.1117/12.861534; https://doi.org/10.1117/12.861534
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