Fiber optical interferometric sensor based on a piezo-driven oscillation

Markus Schulz; Peter Lehmann; Jan Niehues

doi:10.1117/12.860672

2 August 2010 Fiber optical interferometric sensor based on a piezo-driven oscillation

Markus Schulz, Peter Lehmann, Jan Niehues

Author Affiliations +

Proceedings Volume 7790, Interferometry XV: Techniques and Analysis; 77900W (2010) https://doi.org/10.1117/12.860672
Event: SPIE Optical Engineering + Applications, 2010, San Diego, California, United States

Abstract

We established an interferometric sensor for optical precision measurement of distance changes. A fiber-coupled micro-optical probe with an integrated reference surface is mounted on a bending beam. A piezoelectric actuator deflects the beam. Besides focus scanning this deflection modulates the optical path length of the measuring arm of the interferometer, while the reference path remains unchanged. If the distance between optical probe and measuring object changes, characteristic phase shifts of the corresponding interference signals appear. This enables us to achieve an interferometric resolution. The problem of λ/2 ambiguity is solved by using the signal envelope resulting from confocal focus scanning.

Citation Download Citation

Markus Schulz, Peter Lehmann, and Jan Niehues "Fiber optical interferometric sensor based on a piezo-driven oscillation", Proc. SPIE 7790, Interferometry XV: Techniques and Analysis, 77900W (2 August 2010); https://doi.org/10.1117/12.860672

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