2 August 2010 Optical homodyne common-path grating interferometer with sub-nanometer displacement resolution
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Proceedings Volume 7791, Interferometry XV: Applications; 779105 (2010); doi: 10.1117/12.860513
Event: SPIE Optical Engineering + Applications, 2010, San Diego, California, United States
Abstract
Grating interferometers overcome the diffraction limit of optical waves. They can provide nano-scale displacement resolution, and will have great potential for nano-metrology applications. The optical configurations of used grating interferometers are Michelson's type with different paths between the measurement beam and reference beam. Environmental disturbance can directly enter the measured signals and cannot be essentially slashed. Thus the accuracy of the used grating interferometers becomes dramatically worse. In this paper, a homodyne common-path grating interferometer is proposed, that can reduce the environmental disturbance at its lowest level. It has promising potential for nanotechnology applications. The measurement principle and experimental verifications are done in the work.
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Chyan-Chyi Wu, Chun-Yao Cheng, Zi-Yi Yang, "Optical homodyne common-path grating interferometer with sub-nanometer displacement resolution", Proc. SPIE 7791, Interferometry XV: Applications, 779105 (2 August 2010); doi: 10.1117/12.860513; https://doi.org/10.1117/12.860513
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KEYWORDS
Interferometers

Diffraction gratings

Homodyne detection

Actuators

Diffraction

Beam splitters

Environmental sensing

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