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2 August 2010 Integrated interferometer for monitoring three-dimensional vibrations in high-power laser system
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Abstract
This paper presents a new method for measuring vibration based on interference from two spherical waves. By integrating the two interference arms into a beamsplitter cube by reflective film and the probe beam being divided into two parts, the interferometer can distinguish that the vibrations are from the monitored optical components or from laser interferometer system itself. At the same time, because the two interference waves are spherical, it can realize monitoring the three-dimensional vibrations. The experimental setup has advantages of being stable and reliable with an integrated structure. Theoretical analysis and experimental demonstration are performed. The experiment results indicate that the method can monitor three-dimensional vibration sensitively.
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Xuejie Zhang, Wei Huang, De'an Liu, Yan Zhang, Yanli Zhang, and Jianqiang Zhu "Integrated interferometer for monitoring three-dimensional vibrations in high-power laser system", Proc. SPIE 7791, Interferometry XV: Applications, 77910H (2 August 2010); https://doi.org/10.1117/12.860533
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