Integration of a fiber interferometer with a MEMS probe station

Tristan J. Tayag; Thiri Htun; Edward S. Kolesar

doi:10.1117/12.864252

2 August 2010 Integration of a fiber interferometer with a MEMS probe station

Tristan J. Tayag, Thiri Htun, Edward S. Kolesar

Proceedings Volume 7791, Interferometry XV: Applications; 77910R (2010) https://doi.org/10.1117/12.864252
Event: SPIE Optical Engineering + Applications, 2010, San Diego, California, United States

Abstract

We present the integration of an optical fiber interferometer with a MEMS probe station for measuring the out-of-plane displacement of MEMS structures. The interferometric system presented uses a phase generated carrier demodulation scheme. Digital signal processing techniques provide a theoretical measurement dynamic range greater than 10⁸. Experimental results characterizing a novel vertical-lift electro-thermal actuator are presented. These results are in good agreement with modeling data based on finite element analysis.

Citation Download Citation

Tristan J. Tayag, Thiri Htun, and Edward S. Kolesar "Integration of a fiber interferometer with a MEMS probe station", Proc. SPIE 7791, Interferometry XV: Applications, 77910R (2 August 2010); https://doi.org/10.1117/12.864252

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