1 September 2010 Time depending techniques for volume and discrete boundary surface scatterometry and part II of a lost chapter in Lambert's Photometria on multiple reflection
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Abstract
The use of ultra short range Lidar techniques for measuring volume scatter behaviour of semi-transparent materials is investigated. Modern integrated circuits allow the design of low cost solutions for short to ultra short range Lidar applications such as combined multi GHz interferometry and FMCW in power domain. Besides typical in-door applications such as range finders, refined an explicitly tuned configurations can serve as volume scatterometers as well. First system concepts and designs based on off the shelf components are presented. Further, as an appendix for the interested reader, we continue to publish the translation of a chapter on multiple reflections in dioptric systems from Lambert's Photometria.
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Cornelius Hahlweg, Burkhard Meißner, Wenjing Zhao, Hendrik Rothe, "Time depending techniques for volume and discrete boundary surface scatterometry and part II of a lost chapter in Lambert's Photometria on multiple reflection", Proc. SPIE 7792, Reflection, Scattering, and Diffraction from Surfaces II, 77920A (1 September 2010); doi: 10.1117/12.860170; https://doi.org/10.1117/12.860170
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