1 September 2010 Design rules for catadioptric scatterometers based on measurement requirements
Author Affiliations +
The large variety of scatterometric applications and basic scatterometer principles demands design rules to fit the final instrument as well as the data processing and user interface into the requirements of the application in scope. In the current paper we concentrate on the optical design of scatterometers based on a combination of an elliptical mirror and a secondary imaging lens system. The design strategy involves the Scheimpflug principle on two different scales and demands various compromises concerning spot size and angular resolution. The strategy is demonstrated on a practical example.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wenjing Zhao, Wenjing Zhao, Cornelius Hahlweg, Cornelius Hahlweg, Hendrik Rothe, Hendrik Rothe, } "Design rules for catadioptric scatterometers based on measurement requirements", Proc. SPIE 7792, Reflection, Scattering, and Diffraction from Surfaces II, 77920B (1 September 2010); doi: 10.1117/12.860173; https://doi.org/10.1117/12.860173


Toward achromatic soft x ray imaging system with sub 10...
Proceedings of SPIE (September 04 2014)
Sampling passive millimetre-wave imagery
Proceedings of SPIE (November 07 2005)
Verification of scatterometer design
Proceedings of SPIE (September 20 2011)

Back to Top