1 September 2010 Design rules for catadioptric scatterometers based on measurement requirements
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Abstract
The large variety of scatterometric applications and basic scatterometer principles demands design rules to fit the final instrument as well as the data processing and user interface into the requirements of the application in scope. In the current paper we concentrate on the optical design of scatterometers based on a combination of an elliptical mirror and a secondary imaging lens system. The design strategy involves the Scheimpflug principle on two different scales and demands various compromises concerning spot size and angular resolution. The strategy is demonstrated on a practical example.
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Wenjing Zhao, Wenjing Zhao, Cornelius Hahlweg, Cornelius Hahlweg, Hendrik Rothe, Hendrik Rothe, } "Design rules for catadioptric scatterometers based on measurement requirements", Proc. SPIE 7792, Reflection, Scattering, and Diffraction from Surfaces II, 77920B (1 September 2010); doi: 10.1117/12.860173; https://doi.org/10.1117/12.860173
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