1 September 2010 Large-field high-energy KB microscope with aperiodic multilayer
Author Affiliations +
Periodic multilayer KB microscopes have widely implemented in x-ray diagnostic experiments of ICF, especially at relatively high x-ray energies (8keV or higher). But the obvious disadvantage, due to narrow bandwidth of periodic multilayer, is the ununiformity of x-ray image brightness and the limited field of view. The literature describes the characterization of a high-energy KB microscope with aperiodic multilayer configured to achieve larger effective field of view than existing periodic multilayer KB microscopes. The microscope, working on 8keV with grazing angles of 1.1330° and 1.1837°, is capable of 5μm resolution over ±200μm object field. Design of the multilayer and experimental results with a Cu x-ray tube will be shown.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shengzhen Yi, Shengzhen Yi, Baozhong Mu, Baozhong Mu, Zhanshan Wang, Zhanshan Wang, Xin Wang, Xin Wang, Li Jiang, Li Jiang, Jingtao Zhu, Jingtao Zhu, } "Large-field high-energy KB microscope with aperiodic multilayer", Proc. SPIE 7801, Advances in Metrology for X-Ray and EUV Optics III, 78010C (1 September 2010); doi: 10.1117/12.860271; https://doi.org/10.1117/12.860271

Back to Top