29 September 2010 Computer-controlled cylindrical polishing process for development of grazing incidence optics for the hard x-ray region
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Abstract
The focusing performance of shell optics for the hard X-ray region strongly depends on their axial mid-spatialfrequency- range figure errors. This paper presents the development of a deterministic computer-controlled polishing process to minimize these axial figure errors on cylindrical shaped mandrels from which the mirror shells are replicated. A mathematical model has been developed to simulate the residual surface figure errors due to the polishing process parameters and the polishing tools used, along with their non-conformance to the mandrel. We present design considerations of a large-size polishing lap where the experimentally determined process variables have been used for optimizing the lap configuration and the machine operational parameters. Furthermore, the developed model is capable of generating a corrective polishing sequence for a known surface error profile. Practical polishing experiments have been performed to verify the model and to determine its ability to correct known axial figure errors through polishing machine control.
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Gufran S. Khan, Gufran S. Khan, Mikhail Gubarev, Mikhail Gubarev, Chet Speegle, Chet Speegle, Brian Ramsey, Brian Ramsey, "Computer-controlled cylindrical polishing process for development of grazing incidence optics for the hard x-ray region", Proc. SPIE 7802, Advances in X-Ray/EUV Optics and Components V, 78020H (29 September 2010); doi: 10.1117/12.862635; https://doi.org/10.1117/12.862635
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