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25 August 2010 Compact extreme ultraviolet source by use of a discharge-produced potassium plasma for surface morphology application
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Abstract
We have reported a discharge-produced plasma extreme ultraviolet source based on a pure potassium vapor. Potassium ions produced strong broadband emission around 40 nm with a bandwidth of 8 nm [full width at halfmaximum (FWHM)]. The current-voltage characteristics of discharge suggest that the source operates in a hollow cathode mode. By comparison with atomic structure calculations, the broadband emission is found to be primarily due to 3d-3p transitions in potassium ions ranging from K 2+ to K4+.
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Hiromitsu Terauchi, Mami Yamaguchi, Keisuke Kikuchi, Takamitsu Otsuka, Takeshi Higashiguchi, Noboru Yugami, Toyohiko Yatagai, Padraig Dunne, and Gerry O'Sullivan "Compact extreme ultraviolet source by use of a discharge-produced potassium plasma for surface morphology application", Proc. SPIE 7802, Advances in X-Ray/EUV Optics and Components V, 78020T (25 August 2010); https://doi.org/10.1117/12.858603
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