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24 September 2010 An adaptive optical system for sub-10nm hard x-ray focusing
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In the hard X-ray region, to obtain the theoretical resolution or diffraction limited focusing size in an imaging optical system, both ultraprecise optics and highly accurate alignment are necessary. An adaptive optical system is used for the compensation of aberrations in various optical systems, such as optical microscopes and space telescopes. In situ wavefront control of hard X-rays is also effective for realizing ideal performance. The aim of this paper is to develop an adaptive optical system for sub-10nm hard X-ray focusing. The adaptive optical system performs the wavefront measurement using a phase retrieval algorithm and wavefront control using grazing incidence deformable mirrors. Several results of experiments using the developed system are reported.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
H. Mimura, T. Kimura, H. Yokoyama, H. Yumoto, S. Matsuyama, K. Tamasaku, Y. Koumura, M. Yabashi, T. Ishikawa, and K. Yamauchi "An adaptive optical system for sub-10nm hard x-ray focusing", Proc. SPIE 7803, Adaptive X-Ray Optics, 780304 (24 September 2010);

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