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7 December 2010 Suspended polymeric photonic crystals: simulation and fabrication
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Proceedings Volume 7821, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies V; 78211H (2010) https://doi.org/10.1117/12.882388
Event: Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies, 2010, Constanta, Romania
Abstract
In this paper we present simulation of transmission / reflection spectra of polymeric rectangular and hexagonal photonic crystals (PC) as well as the propagation of radiation in a hexagonal PC - based waveguide. The polymeric PC are periodic structures consisting in square arrays of holes configured in suspended membranes of PMMA with different diameters and pitch (100 nm diameter with 500 nm, respectively 800 nm pitch; 200 nm diameter with 500 nm pitch; 400 nm diameter with 700 nm pitch). For fabrication, we propose the bi-layer EBL technique based on simultaneous patterning of a bottom sacrificial layer (LOR 5A - Microchem Corporation) and a positive electron resist (PMMA of different molecular weights). Characterization of nanostructures was performed using SEM imaging and AFM measurements .
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
R. Rebigan, A. Dinescu, C. Kusko, R. Gavrila, D. Cristea, C. Obreja, and P. Schiopu "Suspended polymeric photonic crystals: simulation and fabrication", Proc. SPIE 7821, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies V, 78211H (7 December 2010); https://doi.org/10.1117/12.882388
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