4 December 2010 Optimizing 1D bimorph actuated micromirrors by modifying actuating part geometry
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Proceedings Volume 7821, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies V; 78212D (2010) https://doi.org/10.1117/12.882061
Event: Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies, 2010, Constanta, Romania
Abstract
In this paper the results of the simulation for a bimorph actuated micromirror on silicon substrate are presented. The response of the micromirrors, consisting in the displacement along z axis was investigated in static and dynamic regimes using Coventor software taking into account the material parameters and geometry of the structure. The structure is made from two layers gold and silicon oxide. The gold layer of the structure is patterned in two parts, one actuating part and one reflecting part. Due to this patterning thermal conduction through the gold layer is interrupted and as a result the reflective surface curling is reduced, thus improving reflectivity. The simulations were carried out in order to obtain an optimized structure geometry. We optimized the actuating part geometry analyzing convection, radiation, von Misses stress, temperature and displacement. As a result we need an actuating part with almost constant temperature and von Misses stress and higher displacement. Also we made simulations in order to reduce the stress in the reflective surface.
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Constantin Florin Comanescu, Constantin Florin Comanescu, Catalin Tibeica, Catalin Tibeica, Munizer Purica, Munizer Purica, Paul Schiopu, Paul Schiopu, } "Optimizing 1D bimorph actuated micromirrors by modifying actuating part geometry", Proc. SPIE 7821, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies V, 78212D (4 December 2010); doi: 10.1117/12.882061; https://doi.org/10.1117/12.882061
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