Optical attachment for transformation of output beam of excimer laser

Alexander Zhevlakov; Egor Gavrilov; Sergey Kascheev; Veli Kujanpaa; Timo Savinainen

doi:10.1117/12.885210

22 March 2011 Optical attachment for transformation of output beam of excimer laser

Alexander Zhevlakov, Egor Gavrilov, Sergey Kascheev, Veli Kujanpaa, Timo Savinainen

Proceedings Volume 7822, Laser Optics 2010; 78220C (2011) https://doi.org/10.1117/12.885210
Event: Laser Optics 2010, 2010, St. Petersburg, Russian Federation

Abstract

The optical attachment for transformation the spatial characteristics of excimer laser has been experimentally investigated. The laser beam of rectangular section with sizes of 3 x 20 mm and divergence of 2 x 5 mrad after passage of an optical attachment got the square form 20 x 20 mm and equal divergence of 5 x 5 mrad orthogonal directions. It is shown, that application of such unit in the facilities for microprocessing of materials simplifies an optical path of illumination module, allows to receive the optimum uniformity of irradiation (within 2 %) at reproductive image with micron accuracy in plane of processed material and to mitigate the beam load on optical elements due to suppression of influence of "hot" points.

Citation Download Citation

Alexander Zhevlakov, Egor Gavrilov, Sergey Kascheev, Veli Kujanpaa, and Timo Savinainen "Optical attachment for transformation of output beam of excimer laser", Proc. SPIE 7822, Laser Optics 2010, 78220C (22 March 2011); https://doi.org/10.1117/12.885210

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