Author Affiliations +
Tom Faure,1 Karen Badger,1 Louis Kindt,1 Yutaka Kodera,2 Toru Komizo,2 Shinpei Kondo,3 Takashi Mizoguchi,3 Satoru Nemoto,3 Kazunori Seki,3 Tasuku Senna,3 Richard Wistrom,1 Amy Zweber,1 Kazuhiro Nishikawa,4 Yukio Inazuki,4 Hiroki Yoshikawa4
1IBM Corp. (United States)
2Toppan Printing Co., Ltd. (Japan)
3Toppan Photomasks Inc. (United States)
4ShinEtsu Chemical Corp. (Japan)