24 September 2010 Development of template and mask replication using jet and flash imprint lithography
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Abstract
The Jet and Flash Imprint Lithography (J-FILTM)1-7 process uses drop dispensing of UV curable resists to assist high resolution patterning for subsequent dry etch pattern transfer. The technology is actively being used to develop solutions for memory markets including Flash memory and patterned media for hard disk drives. It is anticipated that the lifetime of a single template (for patterned media) or mask (for semiconductor) will be on the order of 104 - 105 imprints. This suggests that tens of thousands of templates/masks will be required. It is not feasible to employ electronbeam patterning directly to deliver these volumes. Instead, a "master" template - created by directly patterning with an electron-beam tool - will be replicated many times with an imprint lithography tool to produce the required supply of "working" templates/masks. In this paper, we review the development of the pattern transfer process for both template and mask replicas. Pattern transfer of resolutions down to 25nm has been demonstrated for bit patterned media replication. In addition, final resolution on a semiconductor mask of 28nm has been confirmed. The early results on both etch depth and CD uniformity are promising, but more extensive work is required to characterize the pattern transfer process.
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Cynthia Brooks, Cynthia Brooks, Kosta Selinidis, Kosta Selinidis, Gary Doyle, Gary Doyle, Laura Brown, Laura Brown, Dwayne LaBrake, Dwayne LaBrake, Douglas J. Resnick, Douglas J. Resnick, S. V. Sreenivasan, S. V. Sreenivasan, } "Development of template and mask replication using jet and flash imprint lithography", Proc. SPIE 7823, Photomask Technology 2010, 78230O (24 September 2010); doi: 10.1117/12.864332; https://doi.org/10.1117/12.864332
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