Author Affiliations +
Emily Gallagher,1 Obert Wood,2 Louis Kindt,1 Hirokazu Kato,3 Uzodinma Okoroanyanwu,2 John Whang,1 Monica Barrett,1 Tom Wallow2
1IBM Microelectronics (United States)
2GLOBALFOUNDRIES (United States)
3Toshiba America Electronic Components (United States)