29 September 2010 Improvement of actinic blank inspection and phase defect analysis
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Abstract
We have developed an actinic full-field inspection system to detect multilayer phase defect with dark field imaging. A new CCD camera was installed onto the system with an objective of throughput and inspection sensitivity improvement. As the result, the throughput was improved from 14.25 to 4.75 hours per plate, and the detection probability for 1.2 nmhigh 40 nm-wide defect was found to be 95.7 %. This means that the system has a potential of its extendibility to beyond 22 nm HP inspection.
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Takeshi Yamane, Toshihiko Tanaka, Tsuneo Terasawa, Osamu Suga, "Improvement of actinic blank inspection and phase defect analysis", Proc. SPIE 7823, Photomask Technology 2010, 78231V (29 September 2010); doi: 10.1117/12.864290; https://doi.org/10.1117/12.864290
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