Noncontact fiber optic micrometer

F. Betancourt Ibarra; Candelario Guajardo-Gonzalez; Arturo Castillo-Guzman; Valentin Guzman-Ramos; Romeo Selvas

doi:10.1117/12.869392

14 October 2010 Noncontact fiber optic micrometer

F. Betancourt Ibarra, Candelario Guajardo-Gonzalez, Arturo Castillo-Guzman, Valentin Guzman-Ramos, Romeo Selvas

Proceedings Volume 7839, 2nd Workshop on Specialty Optical Fibers and Their Applications (WSOF-2); 783927 (2010) https://doi.org/10.1117/12.869392
Event: Workshop on Specialty Optical Fibers and Their Applications (WSOF-10), 2010, Oaxaca, Mexico

Abstract

A sensor instrument able to measuring the thickness of different semitransparent objects with a resolution of one micron is described. This is based on a fiber optic reflectometer and a laser autofocus system and permit to measuring the thickness of thin surfaces such as semiconductor films, plastic materials and semitransparent objects. The response time for the measuring was roughly 2 sec and the thickness results were compared with a digital mechanical micrometer and both are in good agreement.

Citation Download Citation

F. Betancourt Ibarra, Candelario Guajardo-Gonzalez, Arturo Castillo-Guzman, Valentin Guzman-Ramos, and Romeo Selvas "Noncontact fiber optic micrometer", Proc. SPIE 7839, 2nd Workshop on Specialty Optical Fibers and Their Applications (WSOF-2), 783927 (14 October 2010); https://doi.org/10.1117/12.869392

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