6 December 2010 Advances in ion beam sputtered Sc2O3 for optical interference coatings
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Abstract
Scandium oxide is an attractive candidate for the engineering of interference coatings, although not widely explored. This paper describes the ion beam sputtering of Sc2O3. It is shown that the structural properties of the material are affected by the deposition conditions. Laser damage in different regimes of pulsewidths is investigated. These results show that the 1-on-1 laser damage fluence, in both the thermal and deterministic regimes, varies with deposition conditions but this is not the case for S-on-1, indicating that laser-induced defects are important.
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Carmen S. Menoni, Erik M. Krous, Dinesh Patel, Peter Langston, Jonathan Tollerud, Duy N. Nguyen, Luke A. Emmert, Ashot Markosyan, Roger Route, Martin Fejer, Wolfgang Rudolph, "Advances in ion beam sputtered Sc2O3 for optical interference coatings", Proc. SPIE 7842, Laser-Induced Damage in Optical Materials: 2010, 784202 (6 December 2010); doi: 10.1117/12.855604; https://doi.org/10.1117/12.855604
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