16 November 2010 Investigation on femtosecond laser-assisted microfabrication in silica glasses
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Abstract
Fabrication of microstructures embedded in silica glasses using a femtosecond (fs)-laser-assisted chemical etching technique is systematically studied in this work. By scanning the laser pulses inside samples followed by the treatment of 5%-diluted hydrofluoric (HF) acid, groups of straight channels are fabricated and the relationship between the etching rate and processing parameters, including laser power, scanning speed, scanning time and laser polarization, is demonstrated. Based on the optimization of these parameters, complicated microstructures such as channels, cavities and their combinations are manufactured. The work has great potential applications in microelectromechanical systems, biomedical detection and chemical analysis.
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Hewei Liu, Hewei Liu, Feng Chen, Feng Chen, Qing Yang, Qing Yang, Jinhai Si, Jinhai Si, Xun Hou, Xun Hou, } "Investigation on femtosecond laser-assisted microfabrication in silica glasses", Proc. SPIE 7843, High-Power Lasers and Applications V, 78430V (16 November 2010); doi: 10.1117/12.869845; https://doi.org/10.1117/12.869845
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