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16 November 2010 Study of silicon photonics based on standard CMOS foundry
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Abstract
Silicon photonics can found applications in optical interconnects and optical signal processing. Recent years, silicon photonics was developed rapidly. In this paper, we report our research work on silicon photonics. Based on the standard CMOS foundry, we studied the silicon waveguides and related photonic components.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jianyi Yang, Yong Zhao, Chen Qiu, Wanjun Wang, Guomin Jiang, Yinlei Hao, and Xiaoqing Jiang "Study of silicon photonics based on standard CMOS foundry", Proc. SPIE 7847, Optoelectronic Devices and Integration III, 78470E (16 November 2010); https://doi.org/10.1117/12.870406
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