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17 November 2010 Fabrication of the convex blazed grating
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Abstract
The convex grating is one of the key elements in hyperspectral imaging spectrometers. In this paper the diffraction characteristics of the convex blazed grating is investigated by using rigorous coupled-wave theory, which indicates that within the wavelength from 0.4μm to 0.8μm, the plus first-order diffraction efficiency can be over 35% through controlling the blaze angle of blazed grating. The convex blazed grating with the period of 5μm in the center, the blaze angle about 4.3 degree, and the ruled area - a convex substrate with its radius 72mm and aperture 35mm has been fabricated by holographic- scan ion beam etching. Experimental measurements show that the plus first-order diffraction efficiency is more than 35%, within the wavelength from 0.4μm to 0.8μm.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Quan Liu, Haibin Wang, Peng Sun, and Jianhong Wu "Fabrication of the convex blazed grating", Proc. SPIE 7848, Holography, Diffractive Optics, and Applications IV, 78480V (17 November 2010); https://doi.org/10.1117/12.870125
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