Fabrication of microstructures on silicon by multiple beam holographic method using nanosecond laser pulses

Heng Zhang; Zongbao Fang; Linsen Chen

doi:10.1117/12.870325

17 November 2010 Fabrication of microstructures on silicon by multiple beam holographic method using nanosecond laser pulses

Heng Zhang, Zongbao Fang, Linsen Chen

Author Affiliations +

Proceedings Volume 7848, Holography, Diffractive Optics, and Applications IV; 78480W (2010) https://doi.org/10.1117/12.870325
Event: Photonics Asia 2010, 2010, Beijing, China

Abstract

Micron-sized grating structures (MGS) and sub-micron sized dot arrays (DA) were generated on silicon target by multiple shots of interfering nanosecond laser beams. The mechanism to form MGS and DA were analyzed and it is found that the obtained structures have a negative shape of the interference pattern. The most major size of the periodic structure is 500 nm. The optical properties of these nanostructures are also investigated. The silicon DAs function as both absorber and antireflection layers, which offer a promising approach to enhance the solar cell energy conversion efficiency.

Citation Download Citation

Heng Zhang, Zongbao Fang, and Linsen Chen "Fabrication of microstructures on silicon by multiple beam holographic method using nanosecond laser pulses", Proc. SPIE 7848, Holography, Diffractive Optics, and Applications IV, 78480W (17 November 2010); https://doi.org/10.1117/12.870325

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