9 November 2010 Corrective, deterministic, and/or generative sub-aperture finishing
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Abstract
Sub-aperture finishing is applied for the correction of the optical surface. Most important issue is how to keep stabilized sub-aperture tool contact (footprint) condition and control a removal rate and a dwell time. Magneto Rheological Finishing is one of the most advanced sub-aperture finishing process. For several years, this process was applied for a correction of spherical or flat surface after precisely measured surface data. The authors have reviewed and improved this finishing process to get more reliable finishing result. This paper shows MRF is furthermore cable to "generate" a desired optical profile from existing surface under completely controlled finishing circumstance and metrology feedback.
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Ken Tanimura, Ken Tanimura, Kazuto Hori, Kazuto Hori, Noboru Sugimoto, Noboru Sugimoto, Toshihide Dohi, Toshihide Dohi, } "Corrective, deterministic, and/or generative sub-aperture finishing", Proc. SPIE 7849, Optical Design and Testing IV, 784907 (9 November 2010); doi: 10.1117/12.871940; https://doi.org/10.1117/12.871940
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