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9 November 2010 White light interferometry for fast areal surface measurement based on GPGPU
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Abstract
White-light interferometry is always an extremely useful and powerful tool for optical surface measurement. In this paper, a novelty method based on rapid positioning and fast surface measurement is proposed. The adjustment of optical path difference (OPD) is done automatically by a wavelength scanning method, and the processing of white-light interference patterns is accelerated by GPGPU which stands for General-Purpose computation on Graphics Processing Units, also known as GPU Computing. Graphics Processing Units are high-performance many-core processors in which the data are processed in parallel. As a result, the time we need to obtain a surface shape is reduced to ten percents compared with the conventional white-light interferometry. With these advantages, it is possible to measure a rough and areal surface in a short time.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jing Wang, Kaiwei Wang, Shuangshuang Zhao, Li Lin, and Jian Bai "White light interferometry for fast areal surface measurement based on GPGPU", Proc. SPIE 7849, Optical Design and Testing IV, 784918 (9 November 2010); https://doi.org/10.1117/12.870336
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