9 November 2010 Defocus measuring the focal length of microlens array by grating prismatic interference
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Abstract
Microlens-arrays have been used in many fields; it's difficult to measure the focal length by traditional method. This paper introduces a new technique for the focal length measurement. Place the grating close-by the focal point and make the +1 order and 0 order rays diffracted from the grating interfering, from the number of interference stripe we can get the grating defocus, ulterior finish the focal length testing. In this paper, we enumerate the expression between the defocusing and the interference stripe number. At the same time, we make an experiment to prove the feasibility. The experiment result shows that this technique has a higher testing accuracy and efficiency as opposed to traditional method.
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Xianchang Zhu, Xuedong Cao, Shibin Wu, Fan Wu, "Defocus measuring the focal length of microlens array by grating prismatic interference", Proc. SPIE 7849, Optical Design and Testing IV, 78491D (9 November 2010); doi: 10.1117/12.868326; https://doi.org/10.1117/12.868326
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