Porous silicon based resonant grating filters for biochemical sensing applications

Xiaoyi Lv; Jiaqing Mo; Zhenhong Jia; Mei Xiang; Furu Zhong; Tao Jiang

doi:10.1117/12.869703

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9 November 2010 Porous silicon based resonant grating filters for biochemical sensing applications

Xiaoyi Lv, Jiaqing Mo, Zhenhong Jia, Mei Xiang, Furu Zhong, Tao Jiang

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Proceedings Volume 7853, Advanced Sensor Systems and Applications IV; 785308 (2010) https://doi.org/10.1117/12.869703
Event: Photonics Asia 2010, 2010, Beijing, China

Abstract

Porous silicon has attracted a great deal of attention and research for biochemical sensing applications. In this study, we report a novel porous silicon based resonant grating filters as an optical sensor platform. A narrow bandwidth in the reflectance spectrum is shown of this porous silicon grating filters and this resonance dip shift obviously after little infiltration. This research also played a potential role for the extensive applications in all-silicon biosensor.

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Xiaoyi Lv, Jiaqing Mo, Zhenhong Jia, Mei Xiang, Furu Zhong, and Tao Jiang "Porous silicon based resonant grating filters for biochemical sensing applications", Proc. SPIE 7853, Advanced Sensor Systems and Applications IV, 785308 (9 November 2010); https://doi.org/10.1117/12.869703

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