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9 November 2010 Theoretical and experimental study on chromatic confocal position sensor
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Abstract
In this paper, the chromatic confocal technique application in position measurement is studyed theoretically and experimentally. Firstly, a set of refractive lenses are designed and a position measurement device is established for this purpose. Then, calibration of wavelength-depth relationship has been performed. The calibration results accords with the theoretical design results well. Third, influence of the detector pinhole size on axial resolution of the measurement system is analyzed. It is clear from numerical simulation that the full width of half maximum (FWHM) of spectral distribution on the detector will increase with enlargement of pinhole size, which makes axial resolution decrease. The experiment results also disclose identical tendency. It can be concluded that the position measurement system can realize rapid position measurement with higher precision.
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Chun-Hui Niu, Wen-Yi Deng, Xian-Hui Mao, Xin Gao, and Cong Han "Theoretical and experimental study on chromatic confocal position sensor", Proc. SPIE 7853, Advanced Sensor Systems and Applications IV, 78531B (9 November 2010); https://doi.org/10.1117/12.867706
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