9 November 2010 Optical fiber humidity sensor with PVDF thin film as sensitive element
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A novel optical fiber humidity sensor using polyvinylidene fluoride (PVDF) as sensitive material was proposed in this paper. Three-layer coating was deposited on the end-face of optical fiber, which constructs an extrinsic Fabry-Perot (F-P) interference structure. Ag layer deposited by DC magnetron sputtering was used as mirror layer in the F-P interference structure. PVDF layer was realized with Czochralski method as F-P cavity. Simulation was performed using data fitting to analysis the relevant parameters on sensor performance. Experimental result shows the interference fringe shifts to longer wavelength when relative humidity increases. The fringe shifted 2.4nm with a good linearity response when relative humidity increases from 11% to 97%. The linearity of interference fringe shift to relative humidity was 0.98415, the response time was less than 1min.
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Xiaobing Li, Xiaobing Li, Minghong Yang, Minghong Yang, Jixiang Dai, Jixiang Dai, Hongliang Liu, Hongliang Liu, Dan Yin, Dan Yin, Lijie Dong, Lijie Dong, } "Optical fiber humidity sensor with PVDF thin film as sensitive element", Proc. SPIE 7853, Advanced Sensor Systems and Applications IV, 78533T (9 November 2010); doi: 10.1117/12.871725; https://doi.org/10.1117/12.871725

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