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4 November 2010 A detection technology of THz based on surface plasmon resonance
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This paper describes a new detection technology related to the bolometric micromechanical sensor for detecting THz radiation. The micromechanical sensor comprises thermo-sensitive bi-material micro-cantilever, micro-prism and optical readout system based on surface plasmon resonance for detecting the bending of the micro-cantilever. In static mode, incident radiation absorption raises the temperature of cantilever and, as a result, it bends proportionally. The cantilever bending changes the thicknesses of the gap between the lower surface of the cantilever and the metallic thin film. It will result in a shift of the SPR angle. Consequently, the surface plasmon excitation efficiency and therewith the measured at a fixed incident angle reflectance of a metallic film will be changed almost proportionally to the cantilever bending. Therefore the incident radiation power can be determined via the metallic film reflectivity change. The paper introduces the bi-material for fabricating the micro-cantilever and the optimal thickness of the gold film which is obtained through computer simulation. The material of silicon is used to fabricate the micro-prism, and the technique procedure for manufacturing the micro-prism and the micro-cantilever is described in detail. Because of its uncooled performance of the detection technology, the micromechanical sensor will have a low cost and be easy for fabrication of large bi-dimensional arrays.
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Bo Su, Guoteng Duan, and Cunlin Zhang "A detection technology of THz based on surface plasmon resonance", Proc. SPIE 7854, Infrared, Millimeter Wave, and Terahertz Technologies, 78541H (4 November 2010);

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