Abstract
Terahertz ray, as a new style optic source, usually means the electromagnetic whose frequencies lies
in between 0.1THz~10THz, the waveband region of the electromagnetic spectrum lies in the gap between microwaves and
infrared ray. With the development of laser techniques, quantum trap techniques and compound semiconductor techniques,
many new terahertz techniques have been pioneered, motivated in part by the vast range of possible applications for
terahertz imaging, sensing, and spectroscopy. THz imaging technique was introduced, and THz imaging can give us not
only the density picture but also the phase information within frequency domain. Consequently, images of suspicious
objects such as concealed metallic or metal weapons are much sharper and more readily identified when imaged with
THz imaging scanners. On the base of these, the application of THz imaging in nondestructive examination, more
concretely in large scale circuit failure inspection was illuminated, and the important techniques of this application were
introduced, also future prospects were discussed. With the development of correlative technology of THz, we can draw a
conclusion that THz imaging technology will have nice application foreground.
