Profilometry using Fizeau-interferometer based on optical comb interferometry and sinusoidal phase modulation method

Samuel Choi; Hidetaka Miyatsuka; Osami Sasaki; Takamasa Suzuki

doi:10.1117/12.870985

11 November 2010 Profilometry using Fizeau-interferometer based on optical comb interferometry and sinusoidal phase modulation method

Samuel Choi, Hidetaka Miyatsuka, Osami Sasaki, Takamasa Suzuki

Author Affiliations +

Proceedings Volume 7855, Optical Metrology and Inspection for Industrial Applications; 78550K (2010) https://doi.org/10.1117/12.870985
Event: Photonics Asia 2010, 2010, Beijing, China

Abstract

A profilometry based on Fizeau interferometer using the optical comb and the sinusoidal phase modulation technique is demonstrated. The optical comb generated with the Fabry-Perot etalon and a SLD is introduced in the Fizeau interferometer. The interval wave number of comb is swept by controlling the resonance length of the Fabry-Perot etalon. The sweeping range is about 500 μm. The displacement measurement is performed by determination of zerophase or π-phase positions. The accuracy estimated from 5 repeated experiments is about 0.2 rad.

Citation Download Citation

Samuel Choi, Hidetaka Miyatsuka, Osami Sasaki, and Takamasa Suzuki "Profilometry using Fizeau-interferometer based on optical comb interferometry and sinusoidal phase modulation method", Proc. SPIE 7855, Optical Metrology and Inspection for Industrial Applications, 78550K (11 November 2010); https://doi.org/10.1117/12.870985

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