11 November 2010 Computer simulation of phase-shift algorithm
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When applying phase-stepping interferometry to measure wavefront with aberration, distortion is caused by various factors and the main one is phase-shifting error from phase shifter. In this paper, the calculation theory and consequence in measurement error of the phase shift algorithm are discussed. These algorithms include traditional three-phase algorithm, traditional four-phase algorithm, traditional five-phase algorithm, carre algorithm, new compensating four-phase algorithm and new compensating five-phase algorithm. According to the theory analysis and computer stimulation, these methods are compared through introduce phase-shifting error, wavefront aberration and Gauss noise, the results show the new compensating five-phase algorithm is immune to phase-shifting error, and its result is insensitive to Gauss noise, it can improve measurement accuracy effectively.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Gang Wang, Ji-xiang Yan, "Computer simulation of phase-shift algorithm", Proc. SPIE 7855, Optical Metrology and Inspection for Industrial Applications, 78551O (11 November 2010); doi: 10.1117/12.869917; https://doi.org/10.1117/12.869917

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