Algorithm for determining line centre with microscope measuring system

Hengzheng Wei; Weinong Wang; Guoying Ren; Limei Pei

doi:10.1117/12.871046

11 November 2010 Algorithm for determining line centre with microscope measuring system

Hengzheng Wei, Weinong Wang, Guoying Ren, Limei Pei

Proceedings Volume 7855, Optical Metrology and Inspection for Industrial Applications; 785524 (2010) https://doi.org/10.1117/12.871046
Event: Photonics Asia 2010, 2010, Beijing, China

Abstract

A new method for determining line centre is proposed within a microscope imaging measurement system. Due to the optical diffraction effect the image of each line on the scale is stripe shaped. The strip can be molded as two edges that close together. With the gradient algorithm all the local maximum and minimum in the line scale image are detected. Therefore the rising and falling edge can be positioned in pixel level. The line centre is then the middle of between the rising and falling edge. To achieve a high level accuracy of the centre position, with the points near the line centre in the gradient image a least-squares line fitting algorithm is used. The zero gradient magnitude is located with sub-pixel resolution. Experiments have been performed with a standard line scale under different objectives. Results indicate the effectiveness of the method.

Citation Download Citation

Hengzheng Wei, Weinong Wang, Guoying Ren, and Limei Pei "Algorithm for determining line centre with microscope measuring system", Proc. SPIE 7855, Optical Metrology and Inspection for Industrial Applications, 785524 (11 November 2010); https://doi.org/10.1117/12.871046

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