27 January 2011 Measurement of micro gears: comparison of optical, tactile-optical, and CT measurements
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Abstract
Micro gears are applied in an increasing quantity in many applications. Therefore, precise measurements are of growing importance to ensure their quality. This contribution describes the measurement of gears of a micro planetary gear set with a tactile probe, a tactile-optical probe, an optical sensor, and computed tomography (CT). For the tactile measurements, a high precision piezoresistive microprobe was used. A so-called fiber probe was applied for tactile-optical measurements. This probe applies image processing to determine the position of the tactile probing element. For all tactile and tactile-optical measurements, single point probing was used. The optical measurements were carried out with an imaging sensor based on focus variation. Due to limited accessibility, on some gears not all regions could be measured by the optical sensor and the tactile-optical probe. In contrast to this, with CT the whole part could be measured with high point density. We used a micro-CT system and carried out measurements with Synchrotron-CT. All the sensors used deliver measurement data in Cartesian coordinates. It is a challenge to transfer these data into coordinates in which gear parameters are defined. For this, special attention must be paid to the determination of the gear axis and to the orientation of the teeth. The applied procedures are detailed for different micro gears. The comparison between data of different measurements was carried out successfully. The deviations between the CT data and the tactile or tactile-optical data lie in the range of only a few micrometers.
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U. Neuschaefer-Rube, U. Neuschaefer-Rube, M. Bartscher, M. Bartscher, M. Neukamm, M. Neukamm, M. Neugebauer, M. Neugebauer, F. Härtig, F. Härtig, J. Goebbels, J. Goebbels, K. Ehrig, K. Ehrig, A. Staude, A. Staude, } "Measurement of micro gears: comparison of optical, tactile-optical, and CT measurements", Proc. SPIE 7864, Three-Dimensional Imaging, Interaction, and Measurement, 78640H (27 January 2011); doi: 10.1117/12.872413; https://doi.org/10.1117/12.872413
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