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7 February 2011Image registration for stability testing of MEMS
Image registration, or alignment of two or more images covering the same scenes or objects, is of great interest in many
disciplines such as remote sensing, medical imaging, astronomy, and computer vision. In this paper, we introduce a
new application of image registration algorithms. We demonstrate how through a wavelet based image registration
algorithm, engineers can evaluate stability of Micro-Electro-Mechanical Systems (MEMS). In particular, we applied
image registration algorithms to assess alignment stability of the MicroShutters Subsystem (MSS) of the Near Infrared
Spectrograph (NIRSpec) instrument of the James Webb Space Telescope (JWST). This work introduces a new
methodology for evaluating stability of MEMS devices to engineers as well as a new application of image registration
algorithms to computer scientists.
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Nargess Memarsadeghi, Jacqueline Le Moigne, Peter N. Blake, Peter A. Morey, Wayne B. Landsman, Victor J. Chambers, Samuel H. Moseley, "Image registration for stability testing of MEMS," Proc. SPIE 7873, Computational Imaging IX, 78730G (7 February 2011); https://doi.org/10.1117/12.872076