8 February 2011 PMMA-micro goblet resonators for biosensing applications
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We report on a new type of whispering gallery mode (WGM) resonator made of out of low-loss polymer poly (methyl methacrylate) (PMMA). These optical cavities are fabricated using standard semiconductor processing methods in combination with a specific thermal reflow process. During this subsequent thermal treatment, surface tension leads to the goblet like geometry of the resonator and to an ultra smooth surface. The Q-factor of these goblet resonators is above 2·106 in the 1310 nm wavelength range. In order to demonstrate the applicability of the goblet resonators for bio sensing, Bovine Serum Albumin was detected by monitoring the shift of resonator modes due to protein adsorption.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Torsten Beck, Torsten Beck, Mario Hauser, Mario Hauser, Tobias Grossmann, Tobias Grossmann, Dominik Floess, Dominik Floess, Simone Schleede, Simone Schleede, Julian Fischer, Julian Fischer, Christoph Vannahme, Christoph Vannahme, Timo Mappes, Timo Mappes, Heinz Kalt, Heinz Kalt, } "PMMA-micro goblet resonators for biosensing applications", Proc. SPIE 7888, Frontiers in Biological Detection: From Nanosensors to Systems III, 78880A (8 February 2011); doi: 10.1117/12.874871; https://doi.org/10.1117/12.874871


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