3 March 2011 UV power scaling of INNOSLAB lasers
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Abstract
Because of their high absorptions UV lasers are widely used for precision machining in LED, and micro electronic production. To increase productivity high average power of UV lasers are required. Lasers with pulse energy and short pulse are favourable for UV sources through third and forth harmonic generation. Using an INNOSLAB laser more than 50W at 355nm and more than 30W at 266nm have been obtained. In this paper the experimental results will be presented and discussed.
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Daijun Li, Shaojun Fu, Jun Chen, Keming Du, "UV power scaling of INNOSLAB lasers", Proc. SPIE 7912, Solid State Lasers XX: Technology and Devices, 79120V (3 March 2011); doi: 10.1117/12.877125; https://doi.org/10.1117/12.877125
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