22 February 2011 Laser surface structuring with long depth of focus
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Proceedings Volume 7920, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI; 79200W (2011); doi: 10.1117/12.881189
Event: SPIE LASE, 2011, San Francisco, California, United States
Abstract
Theoretical and experimental results concerning the use of axicons for laser-ablation are reported. Analytical formulas allow to predict the generated fluence distributions and the expected ablation widths. The influence of an imperfect axicon tip is discussed. The long depth of focus of the generated beam enables easy small-sized laser marking in dimension of the laser wavelength.
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Andreas Michalowski, Christian Freitag, Rudolf Weber, Thomas Graf, "Laser surface structuring with long depth of focus", Proc. SPIE 7920, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI, 79200W (22 February 2011); doi: 10.1117/12.881189; https://doi.org/10.1117/12.881189
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KEYWORDS
Axicons

Laser ablation

Laser marking

Laser energy

Bessel beams

Bessel functions

Laser applications

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