Directly induced ablation of metal thin films by ultrashort laser pulses

Gerhard Heise; Jan Konrad; Sebastian Sarrach; Jürgen Sotrop; Heinz P. Huber

doi:10.1117/12.876451

15 February 2011 Directly induced ablation of metal thin films by ultrashort laser pulses

Gerhard Heise, Jan Konrad, Sebastian Sarrach, Jürgen Sotrop, Heinz P. Huber

Proceedings Volume 7925, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XI; 792511 (2011) https://doi.org/10.1117/12.876451
Event: SPIE LASE, 2011, San Francisco, California, United States

Abstract

Molybdenum films on a glass substrate are ablated from the glass side by picosecond laser pulses at fluences below 1 J/cm², without damage. Thin films of chromium, titanium and platinum with thicknesses between 200 nm and 1 μm were examined to investigate the underlying ablation mechanisms. For molybdenum an influence of the intermediate buffer layer was observed. Ablation from the glass side clearly has higher ablation efficiency and a better structural quality in contrast to metal side patterning. A model will be presented, in which the ablation characteristics are connected with the mechanical ductility of the metal.

Citation Download Citation

Gerhard Heise, Jan Konrad, Sebastian Sarrach, Jürgen Sotrop, and Heinz P. Huber "Directly induced ablation of metal thin films by ultrashort laser pulses", Proc. SPIE 7925, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XI, 792511 (15 February 2011); https://doi.org/10.1117/12.876451

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