15 February 2011 Directly induced ablation of metal thin films by ultrashort laser pulses
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Abstract
Molybdenum films on a glass substrate are ablated from the glass side by picosecond laser pulses at fluences below 1 J/cm2, without damage. Thin films of chromium, titanium and platinum with thicknesses between 200 nm and 1 μm were examined to investigate the underlying ablation mechanisms. For molybdenum an influence of the intermediate buffer layer was observed. Ablation from the glass side clearly has higher ablation efficiency and a better structural quality in contrast to metal side patterning. A model will be presented, in which the ablation characteristics are connected with the mechanical ductility of the metal.
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Gerhard Heise, Gerhard Heise, Jan Konrad, Jan Konrad, Sebastian Sarrach, Sebastian Sarrach, Jürgen Sotrop, Jürgen Sotrop, Heinz P. Huber, Heinz P. Huber, "Directly induced ablation of metal thin films by ultrashort laser pulses", Proc. SPIE 7925, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XI, 792511 (15 February 2011); doi: 10.1117/12.876451; https://doi.org/10.1117/12.876451
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