Fabrication of electrostatic-actuated single-crystalline 4H-SiC bridge structures by photoelectrochemical etching

Naoki Watanabe; Tsunenobu Kimoto; Jun Suda

doi:10.1117/12.874543

14 February 2011 Fabrication of electrostatic-actuated single-crystalline 4H-SiC bridge structures by photoelectrochemical etching

Naoki Watanabe, Tsunenobu Kimoto, Jun Suda

Author Affiliations +

Proceedings Volume 7926, Micromachining and Microfabrication Process Technology XVI; 79260B (2011) https://doi.org/10.1117/12.874543
Event: SPIE MOEMS-MEMS, 2011, San Francisco, California, United States

Abstract

An electrostatic-actuated suspended bridge structure composed by single-crystalline silicon carbide (SiC) is fabricated. The structure is entirely made of homoepitaxially grown single-crystalline 4H-SiC. Electrical isolation between the suspended bridge and the base plate is established with a pnp junction formed by multiple ion implantation. The structure is fabricated by a combination of reactive ion etching (RIE) and doping-selective photoelectrochemical (PEC) etching. The suspended bridge is actuated by applying a voltage between the bridge and the base plate.

Citation Download Citation

Naoki Watanabe, Tsunenobu Kimoto, and Jun Suda "Fabrication of electrostatic-actuated single-crystalline 4H-SiC bridge structures by photoelectrochemical etching", Proc. SPIE 7926, Micromachining and Microfabrication Process Technology XVI, 79260B (14 February 2011); https://doi.org/10.1117/12.874543

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available