8 February 2011 Advanced fabrication methods for 3D meta-optics
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Proceedings Volume 7927, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV; 792706 (2011); doi: 10.1117/12.877173
Event: SPIE MOEMS-MEMS, 2011, San Francisco, California, United States
Abstract
Micro-Optics has expanded to include a wide variety of applications for spectral filtering, polarization filtering and beam shaping. Recently, a new class of optical elements have been introduced that can combine the spectral, polarization, and beam conditioning into the same optical element. This engineered optical functionality results in a 3D Meta-Optic structure that relies on sub-wavelength features to essentially engineer the electromagnetic fields within the structure; thereby, resulting in highly dispersive structures that spatially vary across the optical element. This talk will summarize recent results in the design, fabrication and applications of 3D Meta-Optics.
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E. G. Johnson, M. K. Poutous, Z. A. Roth, P. Srinivasan, A. J. Pung, Y. O. Yilmaz, "Advanced fabrication methods for 3D meta-optics", Proc. SPIE 7927, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV, 792706 (8 February 2011); doi: 10.1117/12.877173; https://doi.org/10.1117/12.877173
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KEYWORDS
Photomasks

Analog electronics

Lithography

Critical dimension metrology

Optical filters

Optical components

Photoresist materials

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